X-Y scan range
X-Y方向扫描范围
|
90µm x 90µm typical, 85µm minimum
90µm × 90µm 典型值，*小85µm
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Z range
Z方向扫描范围
|
10µm typical in imaging and force curve modes, 9.5µm minimum
在成像及力曲线模式下典型值为10μm；*小9.5μm
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Vertical noise floor
垂直方向噪音基底
|
< 30pm RMS in appropriate environment typical imaging bandwidth (up to 625Hz)
< 30pmRMS, 在合适的环境及典型的成像带宽(达到625Hz)
|
X-Y position noise(closed-loop)
X-Y定位噪音(闭环)
|
≤0.15nm RMS typical imaging bandwidth (up to 625Hz)
≤0.15nm RMS，典型成像带宽(达到625Hz)
|
X-Y position noise(open-loop)
X-Y定位噪音(开环)
|
≤0.10nm RMS typical imaging bandwidth (up to 625Hz)
≤0.10nm RMS，典型成像带宽(达到625Hz)
|
Z sensor noise level(closed-loop)
Z传感器噪音水平(闭环)
|
35pm RMS typical imaging bandwidth (up to 625Hz);
50pm RMS, force curve bandwidth (0.1Hz to 5kHz)
35pm RMS，典型成像带宽(达到625Hz);
50pm RMS，力曲线成像带宽(0.1Hz to 5kHz)
|
Integral nonlinearity(X-Y-Z)
整体线性误差(X-Y-Z)
|
< 0.5% typical
< 0.5% 典型值
|
Sample size/holder
样品尺寸/夹具
|
210mm vacuum chuck for samples, ≤210mm diameter, ≤15mm thick
210mm 真空吸盘样品台；夹具，直径 ≤210mm, 厚度 ≤15mm
|
Motorized position stage
(X-Y axis)
电动定位样品台(X-Y轴)
|
180mm × 150mm inspectable area;
2µm repeatability, unidirectional;
3µm repeatability, bidirectional
180mm × 150mm可视区域;
单向2µm重复性;
双向3µm重复性
|
Microscope optics
显微镜光学系统
|
5-megapixel digital camera;
180µm to 1465µm viewing area;
Digital zoom and motorized focus
五百万像素数字照相机;
180µm至1465µm可视范围;
数字缩放及自动对焦功能
|
Controller
控制器
|
NanoScope V
NanoScope V型控制器
|
Workstation
工作站
|
Integrates all controllers and provides ergonomic design with immediate physical
and visual access
整合所有控制器、结合人体工学设计，提供直接的物理或可视接口
|
Vibration isolation
振动隔绝
|
Integrated, pneumatic
整体式气动减震台
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Acoustic isolation
声音隔绝
|
Operational in environments with up to 85dBC continuous acoustic noise
可隔绝环境中85 dBC的持续噪音
|
AFM modes
AFM模式
|
Standard: ScanAsyst, PeakForce Tapping, TappingMode (air), Contact Mode, Lateral
Force Microscopy, PhaseImaging, Lift Mode, MFM, Force Spectroscopy, Force Volume,
EFM, Surface Potential, Piezoresponse Microscopy, Force Spectroscopy;
Optional: PeakForce QNM, HarmoniX, Nanoindentation, Nanomanipulation,
Nanolithograpy, Force Modulation (air/fluid), TappingMode (fluid), Torsional
Resonance Mode, Dark Lift, STM, SCM, C-AFM, SSRM, PeakForce TUNA,TUNA,
TR-TUNA, VITA
|
Certification
|
CE
|
